| MECHANICAL SPECIFICATION | |
| Chuck Transfer Unit | |
| Size | 205 mm (8 inch) |
| Plating | Nickel |
| Travel X | 300 mm |
| Travel Y | 700mm |
| Resolution X,Y | 0.05 μm |
| Repeatability | ≤1μm |
| Speed | Max 500 mm/s |
| Travel Z | 20 mm |
| Resolution | 0.1 μm |
| Repeatability | ≤2μm |
| Speed | Max10 mm/s |
| Rotary | 360° |
| Resolution | ≤0.005° |
| Repeatability | ≤±0.01° |
| Speed | 2°/s |
| | |
| AXIS-A6: 6 Axis motion optical probe module. (XYZ(θφψ) | |
| Travel (X,Y,Z) | 50mm |
| Resolution | 0.05μm |
| Repeatability | ≤ 1 μm |
| Speed | 50mm/s |
| Rotary (θφψ) | ±4° |
| Resolution | ≤0.002° |
| Repeatability | ≤ ±0.01° |
| Speed | 2°/s |
